ㆍPurpose : COF FCCL AOI ㆍFilm Width : 500mm ㆍResolution : 1.4um/pixel ㆍCamera : TDI Line Scan ㆍDefect : Pinhole, Swelling, Dent, Scratch, Foreign ㆍMinimum defective size : 5um
돌기
스크래치
이물
핀홀
함몰