COF AFVI

COF / FPC
Wafer
Glass
공정별 검사장비
COF AVI-1
COF AVI-2
Spec

ㆍPurpose : 2-Metal COF AFVI
ㆍFilm Width : 35/48/70mm
ㆍResolution : : 1.4㎛/pixel (Option 1.0 ㎛/pixel)
ㆍCamera : TDI Line Scan
ㆍDefect : Open, Short, Mouse-bite, Protrusion, Top, Visual Defect
ㆍMinimum defective size : 4.2㎛ (Option 3.0㎛)

Example

Open

Short

MB

metal particle

Protrusion

SR particle

SR  filmy

Top defect