ㆍPurpose : DDI Wafer AVI ㆍFilm Width : 8”, 12” ㆍResolution : 0.9㎛/pixel Auto Focusing ㆍCamera : 25M Area ㆍCycle Time : 2 min/wafer (8”) ㆍDefect : Visual Defect, Saw Line ㆍMinimum defective size : 2.7㎛
